HORIZONTALLY ROTATING TYPE SUBSTRATE TRANSFER CARRIER DEVICE IN CARRYING OF DOUBLE ROW SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a transfer carrier device, in which substrates in double rows can be transferred and carried at high speed from a carrying-out part of one processing tank of processing tanks in two rows disposed in parallel to a carrying-in part of the other processing tank adjoining it at an interval, and there is no interference such as contact with each other between thin substrates in double rows while they are transferred and carried.;SOLUTION: On the transfer carrier device 10, a horizontally rotating device 12 is provided, comprising a transfer rail 11 to rotate and move between a carrying-out side rail part 6a of one carrying rail 6 and a carrying-in side rail part 7a of the other carrying rail 7 in a rotation actuation part. On the horizontally rotating device, a substrate guide member 30 and a double row substrate enclosure 40 are provided to integrally rotate and move with the transfer rail. A transfer position fixing means 50 is also provided to fix a hanger tool 3 to suspend the double row substrate W to a transfer position of the transfer rail.;COPYRIGHT: (C)2009,JPO&INPIT