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Less than 200nm lithography for adamantane-based molecular glass photoresist
Less than 200nm lithography for adamantane-based molecular glass photoresist
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机译:基于金刚烷的分子玻璃光刻胶的光刻工艺小于200nm
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摘要
Disclosed are glass photoresists generated from adamantane derivatives containing acetal and/or ester moieties as novel high-performance photoresist materials. Some of the disclosed adamantane-based glass resists have a tripodal structure and other disclosed adamantane-based glass resists include one or more cholic groups. The disclosed adamantane derivatives can be synthesized from starting materials which are commercially available. By way of example only, one of many disclosed amorphous glass photoresists has the following structure:
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