SIMOX WAFER HOLDING PIN, MANUFACTURING DEVICE OF SIMOX WAFER, AND SIMOX WAFER MANUFACTURED BY THE DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress generation of particles by preventing a wafer from rotating while holding it.;SOLUTION: This SIMOX wafer holding pin 20 is to fix a wafer W in an oxygen injecting process in the manufacture of a SIMOX wafer, and is a complex consisting of at least a polyimide based resin and graphite.;COPYRIGHT: (C)2009,JPO&INPIT