Metal material surface oxide measurement method and X-ray diffraction apparatus

摘要

PROBLEM TO BE SOLVED: To provide a measuring method for metal surface oxides capable of accurately measuring the composition and amount of oxides in a surface of a metallic material, and to provide an X-ray diffraction device. SOLUTION: The metallic material having an oxide A and an oxide B in an upper layer and in a lower layer, respectively, of its surface is irradiated with X rays to measure the intensities IA, IB of X rays diffracted by the oxide A and the oxide B, respectively. The existing amount WA of the oxide A is found from the intensity IA of diffracted X rays and from a previously found calibration curve. The existing amount WB of the oxide B is found from the intensity IPB.com of diffracted X rays obtained by correcting the intensity IB by using the X-ray absorption factor of the oxide A and from a previously found calibration curve.