SHEETLIKE PROBE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sheetlike probe which has surface electrodes each having a small diameter and a large projection height from an insulating film and enables sure attainment of a stable state of electric connection even for electrodes to be checked which are formed with small pitches, and to provide a method of manufacturing the same.;SOLUTION: This sheetlike probe has the flexible insulating film which has a plurality of protrusions which are so formed as to correspond to electrodes to be connected and project from the surface, respectively, the surface electrodes in a plurality which are so formed on the surface of the insulating film as to cover the protrusions, respectively, a plurality of back electrodes which are so formed on the backside of the insulating film as to correspond to the surface electrodes, and short circuit parts which are so formed in the insulating film as to pierce the film in the thickness direction thereof and which electrically connect the surface electrodes and the back electrodes corresponding thereto.;COPYRIGHT: (C)2009,JPO&INPIT