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METHOD OF POSITIONING DISK-SHAPED OBJECT, DEVICE OF POSITIONING DISK-SHAPED OBJECT USING THE METHOD, CONVEYING DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
METHOD OF POSITIONING DISK-SHAPED OBJECT, DEVICE OF POSITIONING DISK-SHAPED OBJECT USING THE METHOD, CONVEYING DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
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机译:放置盘状物体的方法,使用该方法放置盘状物体的装置,输送装置以及半导体制造装置
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摘要
PROBLEM TO BE SOLVED: To shorten time of reference position teaching at each port during equipment starting-up in a semiconductor manufacturing apparatus provided with a positioning device and a conveying robot.;SOLUTION: Two points W1 and W2, in which circumference of a disk-shaped object 47 of a wafer or the like and a locus 43 of a detection unit are intersected, are detected; and a center position A of the disk-shaped object is calculated using the two points, a specific point O on a perpendicular bisector 42 of a line segment connecting the two points, and a radius r of the disk-shaped object. This makes the conveying robot perform positioning work; and by using the result, not only modification of a conveying path and reference position teaching in case of starting-up the equipment are mostly automated. In the case where there is a notch, the circumference of the disk-shaped object is detected by two loci of the detection unit and a correct center position is detected. Furthermore, in a disk-shaped object of unknown radius having a notch, the circumference is detected by three loci of the detection unit to obtain a radius, the loci being separated with each other by distance which does not bridge the notch; and accordingly, mix production using a wafer different in diameter becomes possible.;COPYRIGHT: (C)2009,JPO&INPIT
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