A reference position automatic teaching device of the disc-like object that uses a reference position automatic teaching method of the disc-like object, as well as automated transport and method for automatic positioning method, these methods, automatic positioning how devices, and automatic conveying device, automatic semiconductor manufacturing equipment

摘要

To increase the productivity by automating the positioning of the steady production process and reference position teaching at each port during equipment start-up in the semiconductor manufacturing apparatus including the transport robot and positioning device, in the present invention, such as a wafer, detects the W1, W2 2 points of the trajectory 43 of the detection means the circumference of the disc-like object 47 intersect, disc-like object identification and point O 42 on the perpendicular bisector of the segment connecting these with the two points and calculates the center position A of the disk-like object by using the radius r of the. It could be possible to make the positioning operation to the transport robot Thus, the reference position teaching during equipment start-up as well as modification of the conveying path may be automated by using the results. If there is a notch portion, is detected by the locus of the two detection means the circumference of the disc-like object, to find the correct center position. Also, by obtaining the radius by detecting a locus of three of the detecting means of the circular disk-shaped radius of the unknown mixture produced using a wafer having different diameters also become possible.