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Method of manufacturing a microlens, microlens and microlens array and electro-optical device and electronic equipment,
Method of manufacturing a microlens, microlens and microlens array and electro-optical device and electronic equipment,
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机译:制造微透镜,微透镜和微透镜阵列的方法以及电光装置和电子设备,
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摘要
A method of manufacturing a microlens includes: forming on a transparent substrate an etching stop layer in a lens formation region where a curved lens surface of the microlens is to be formed, the etching stop layer having an island shape as a planar shape thereof; forming an intermediate layer on the etching stop layer; forming an etching mask layer on the intermediate layer, the etching mask layer having an opening at a position facing the etching stop layer; and etching, by means of isotropic etching, the intermediate layer from the opening, and etching the transparent substrate and the intermediate layer from a side of the etching stop layer.
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