Design and Fabrication of Electronically Controlled Liquid Crystal Microlens Arrays with Non-uniform Coil Electrode Arrays

摘要

In this paper, a kind of electronically controlled liquid crystal microlens arrays (LCMAs) with non-uniform coil electrodes arrays (NCEAs) is presented. The focal length of the electronically controlled LCMAs can be easily adjusted by applying the appropriate AC signal. The structure of the LCMAs is designed as a NCE array, which can then produce non-uniform electric field to drive liquid crystal molecules. The top electrode is fabricated by depositing an indium-tin-oxide (ITO) semiconductor transparent conductive film based on a non-uniform electrode coil, and the bottom electrode is a conventional plate electrode. Due to the design of non-uniform electrode coil array is small, in addition to the traditional lithography process, the etching process we used is dry etching (ICP etching). The simulation results show that, the focal length of the LCMAs with the NCEAs can be tuned easily by applying the appropriate AC signal.