tert butokishikaruboniruamino content chemical compound and tori (the tert butoxycarbonyl) chemical compound

摘要

PROBLEM TO BE SOLVED: To obtain a proton neutralizer which is efficiently reacted with a proton generated by a dark reaction under a relatively mild condition in resist material storage, does not inhibit a reaction between a proton and a base polymer in exposure to light, has proper reactivity and controls diffusion of a proton.;SOLUTION: The proton neutralizer comprises any of compounds represented by formulas (1)-(3) [^tBOC is a tert-butoxycarbonyl group in the formulas (1)-(3); X is an oxygen atom or an imino group in the formulas (1) and (2); at least one of Y and Z is a group containing a tert-butoxycarbonylamino group (NH-^tBOC) or a tert-butoxycarbonylamino group (N-H-^tBOC) in the formula (1); Ad is an adamanthyl group in formula (2)].;COPYRIGHT: (C)2005,JPO&NCIPI