METHOD FOR MANUFACTURING THIN FILM TYPE THERMO-COUPLE, THIN FILM TYPE THERMO-COUPLE MANUFACTURING APPARATUS USED THEREFOR, THIN FILM TYPE THERMO-COUPLE MANUFACTURED BY USE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film type thermo-couple which is easy in temperature dection, and is excellent in mass productivity, by pressure heating at low temperature a substrate with an electrode in which the electrode of a metal thin film is formed on an insulative substrate, a low-temperature diffused junction of the electrode to the substrate can be carried out in a short time, the adhesion of the substrate and the electrode can be improved, thereby the thin film type thermo-couple which is excellent in durability, handling property, and can increase thermoelectromotive force by raising the density of an alloy electrode can be manufactured.;SOLUTION: The low-temperature diffused junction of the electrode to the substrate is carried out by pressure heating at low temperature the substrate with the electrode in which the electrode of the metal thin film is formed in the insulative substrate.;COPYRIGHT: (C)2009,JPO&INPIT