Through the device, and the particular manner which are used for the neutron leakage inspection manner and particular manner of the fluid machinery being the manner which encloses

摘要

PROBLEM TO BE SOLVED: To provide a method for inspecting leakage of a fluid machine capable of eliminating a housing in a slow leakage state in a short time, a device used for the method, and a fluid machine manufactured via the method.;SOLUTION: In this method, trace gas is filled into the housing of the fluid machine, and the leakage amount of gas is detected as an output value. This method comprises a primary determining step (S204) of detecting the leakage amount after the period required for stabilizing the gas in a normal product elapses and determining the right and wrong of the housing based on the leakage amount, and a secondary determining steps (S205 and S206) of detecting the leakage amount after the lapse of the period a plurality of times and further determining the right and wrong of the housing based on the fluctuation ratio of the leakage amount.;COPYRIGHT: (C)2007,JPO&INPIT