Electron beam measurement or observation device, electron beam measurement or observation method

摘要

PPROBLEM TO BE SOLVED: To provide an electron beam measuring device capable of measuring a three dimensional image of a sample with good precision without depending on the slanting angle or the height of the sample by adjusting an electron optics system of a scanning type charged particle beam so as to conform to an image plan. PSOLUTION: The electron beam measuring device comprises a measuring part 20 making a standard template held by a sample holder 3 relatively slant against an irradiation electron beam 7, and finding a form or the value of coordinate of the standard template depending on a stereographic image photographed by an electron beam detection part 4, a calibration data forming part 30 forming a calibration data of the stereographic image photographed by the electron beam detection part 4 by comparing the result of measurement at the measuring part with a known standard data, and a calibration part 40 calibrating so as to reduce an aberration of an image of the sample detected at the electron beam detection part 4. The form or the value of coordinate of the sample 9 is obtained based on the stereographic image calibrated at the calibration part 40. PCOPYRIGHT: (C)2005,JPO&NCIPI