MICROMECHANICAL STRUCTURE HAVING A SUBSTRATE AND A THERMOELEMENT, TEMPERATURE SENSOR AND/OR RADIATION SENSOR, AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE

摘要

A micromechanical structure, a temperature and/or radiation sensor, and a method for manufacturing a micromechanical structure are suggested, the micromechanical structure including a substrate and a thermoelement having a reference contact and a measuring contact, the substrate having a main substrate plane), the thermoelement having a first material between the reference contact and the measuring contact and a second material between the measuring contact and a further reference contact, either the first material being situated over the second material or the second material being situated over the first material between the reference contact and the measuring contact in a direction perpendicular to the main substrate plane.