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METHOD FOR INSPECTING SETTLING TIME OF DEFLECTION AMPLIFIER, AND METHOD FOR JUDGING FAILURE OF DEFLECTION AMPLIFIER
METHOD FOR INSPECTING SETTLING TIME OF DEFLECTION AMPLIFIER, AND METHOD FOR JUDGING FAILURE OF DEFLECTION AMPLIFIER
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机译:偏转放大器的安装时间的检查方法以及偏转放大器的故障判定方法
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摘要
A method for inspecting a settling time of a deflection amplifier includes setting a settling time, performing shooting a plurality of times alternately to project two patterns of different types which are shaped by making a charged particle beam pass through a first and a second apertures while deflecting the charged particle beam by a deflector controlled by an output of a deflection amplifier which is driven based on the settling time having been set, measuring beam currents of the shooting, calculating an integral current of the beam currents measured, and calculating a difference between the integral current calculated and a reference integral current to output the difference.
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