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Apparatus and method for scanning capacitance microscopy and spectroscopy
Apparatus and method for scanning capacitance microscopy and spectroscopy
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机译:扫描电容显微镜和光谱学的装置和方法
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摘要
An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described.
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