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机译:扫描微波显微镜对掺杂物谱和电容谱的频率分析
Keysight Technologies Austria GmbH, Keysight Labs, Linz, Austria;
Keysight Technologies Austria GmbH, Keysight Labs, Linz, Austria;
Keysight Technologies Austria GmbH, Keysight Labs, Linz, Austria;
Keysight Technologies Austria GmbH, Keysight Labs, Linz, Austria;
Johannes Kepler University, Biophysics Institute, Linz, Austria;
Johannes Kepler University, Biophysics Institute, Linz, Austria;
Technical University of Vienna, Institute of Solid State Electronics, Vienna, Austria;
Infineon Technologies, Failure Analysis, Neubiberg, Germany;
Infineon Technologies, Failure Analysis, Neubiberg, Germany;
Keysight Technologies Austria GmbH, Keysight Labs, Linz, Austria;
Doping; Silicon; Impedance; Solid modeling; Imaging; Calibration; Frequency modulation;
机译:使用扫描微波显微镜对20 GHz高压横向MOS晶体管进行校准的纳米级掺杂物分析和电容
机译:扫描电容显微镜分析的可靠过程适用于功率MOSFET器件的二维掺杂分布图
机译:电子全息图和扫描电容显微镜法测量二维掺杂物分布
机译:扫描电容显微镜和纳米扩散阻力作为半导体掺杂剂分析器的比较
机译:通过扫描电容显微镜对二维掺杂物进行分析。
机译:使用扫描微波显微镜进行可追踪纳米级电容测量的进展
机译:介电特性和掺杂物分布的扫描电容显微镜提取