MICROMOTION MECHANISM AND MICROSCOPE APPARATUS HAVING MICROMOTION MECHANISM

摘要

A micromotion mechanism includes: a fixing base; a movable element supported by the fixing base and movable thereon; an ultrasonic actuator for relatively moving the movable element and the fixing base; and a control device for outputting a drive signal of the ultrasonic actuator. The drive signals of the ultrasonic actuator during the micromotion drive are two types of burst signals equal in frequency and different in phase, and amplitude of the start and end of each of the two burst signals changes, and the maximum amplitude of at least one of the two burst signals is lower than in the normal driving operation.