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Wafer testing system integrated with RFID techniques and thesting method thereof

机译:集成了rfid技术的晶圆测试系统及其设置方法

摘要

This invention provides a wafer testing system and testing method thereof. The wafer testing system comprises a wafer storage section, a prober, a tester, an RFID middleware unit, an EDA system and an MES system. The wafer storage section stores a multiplicity of carriers, each of which is provided with at least a RFID tag. The prober comprises a RFID reader to read a tag information. The tester sends a test signal to the prober for implementing the wafer test so as to generate a test result and calls an interface program to convert the test result into a file conformed with a specific data format. The RFID middleware unit receives the tag information and calls related applications to process the tag information so as to generate a wafer information. The EDA system receives the file of the specific data format converted from the interface program and calculates thereof to generate a wafer yield information after wafer test. The MES system integrates the wafer information from the RFID middleware unit with the yield information from the EDA system so as to allow monitoring the wafer manufacturing process and testing yield rate in a real-time manner.
机译:本发明提供一种晶片测试系统及其测试方法。晶片测试系统包括晶片存储部分,探测器,测试器,RFID中间件单元,EDA系统和MES系统。晶片存储部分存储多个载体,每个载体至少具有一个RFID标签。该探测器包括RFID读取器,以读取标签信息。测试仪将测试信号发送到探测器以执行晶片测试,以生成测试结果,并调用接口程序以将测试结果转换为符合特定数据格式的文件。 RFID中间件单元接收标签信息,并调用相关应用程序以处理标签信息,以产生晶片信息。 EDA系统接收从接口程序转换的特定数据格式的文件,并对其进行计算以在晶片测试后生成晶片成品率信息。 MES系统将来自RFID中间件单元的晶圆信息与来自EDA系统的成品率信息集成在一起,从而可以实时监控晶圆制造过程并测试成品率。

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