A SIMPLE CHEMICAL METHOD FOR DEPOSITING AMORPHOUS RUTHENIUM OXIDE FILMS

摘要

The present investigation is related to a simple chemical method for deposition of amorphous ruthenium oxide (R.UO2) thin films from the aqueous solution of ruthenium(III) chloride (Ru(III)Cl3) at low temperature. The glass and stainless steel substrates were successively immersed in Ru + ion containing solution and double distilled water. The porous morphology was obtained by varying the immersion time periods in the above solutions, bath temperature and deposition cycles. The amorphous films obtained by this method have applications in gas sensors, supercapacitors, anode for lithium batteries etc.