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Hard coating, target for forming hard coating, and method for forming hard coating
Hard coating, target for forming hard coating, and method for forming hard coating
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机译：硬涂层，形成硬涂层的靶和形成硬涂层的方法
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摘要
The present invention attempts to provide a hard coating which has excellent hardness and lubricity. Such attempt has been completed by providing a hard coating comprising (Al 1-a V a ) (C 1-x N x ) wherein 0.27 ‰¤ a ‰¤ 0.75, and 0.3 ‰¤ X ‰¤ 1, wherein a and X independently represent an atomic ratio.
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机译：本发明试图提供一种具有优异的硬度和润滑性的硬质涂层。通过提供一种包括（Al 1-a V a）（C 1-x N x）其中0.27‰a‰0.75，以及0.3‰X‰¤1，其中a和X独立地表示原子比。
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