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The properties and performance of Cr-based multilayer nitride hard coatings using unbalanced magnetron sputtering and elemental metal targets

机译:使用不平衡磁控溅射和元素金属靶的Cr基多层氮化物硬涂层的性能和性能

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Cr-based multilayer hard coatings were produced by unbalanced magnetron sputtering techniques using elemental metal materials. Cr, Ti, Mo, V, Al, and Y target materials were used for the metal sources while nitrogen was introduced at the same time to produce multilayer nitride hard coatings. The deposition process was controlled by a metal plasma optical monitor with closed loop feedback to a piezoelectric valve to form stoichiometric coatings. Physical properties of the coatings were investigated using microhardness, scratch, and Rockwell indentation tests. Wear properties of the coatings were studied using pin-on-disc tests. The coatings were deposited onto hard metal carbide cutting inserts and tool steel drills. The coated inserts were tested on a wide range of difficult-to-machine materials using a Boehringer VDF180-C CNC lathe. The machining was performed under interrupted cutting conditions and the results were compared with those obtained using an advanced commercially available arc deposited TiAlN coating. The coated drills were tested under lubricant environment with severe conditions, comparing it with similar tests on commercial arc deposited TiN coatings.
机译:通过使用元素金属材料的不平衡磁控溅射技术产生基于Cr的多层硬涂层。用于金属源Cr,Ti,Mo,V,Al和Y靶材料,同时引入氮以产生多层氮化物硬涂层。沉积过程由金属等离子体光学监视器控制,具有闭环反馈到压电阀以形成化学计量涂层。使用微硬度,划痕和罗克韦尔凹口试验研究涂层的物理性质。使用引脚盘试验研究涂层的磨损性能。将涂层沉积在硬质金属碳化物切削刀片和工具钢钻上。使用Boehringer VDF180-C CNC车床对涂覆的插入件进行宽敞的难量机材料。在中断切割条件下进行加工,并将结果与​​使用先进的市售电弧沉积的TiAlN涂层进行比较。在具有严重条件下的润滑剂环境下进行涂层钻探,将其与商用弧沉积锡涂层类似的试验进行比较。

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