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Hard coating, target for forming hard coating, and method for forming hard coating
Hard coating, target for forming hard coating, and method for forming hard coating
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机译:硬涂层,形成硬涂层的靶和形成硬涂层的方法
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摘要
The present invention attempts to provide a hard coating which has excellent hardness and lubricity. Such attempt has been completed by providing a hard coating comprising(Al1-aVa) (C1-XNX) wherein0.27≦a≦0.75, and0.3≦X≦1,wherein a and X independently represent an atomic ratio.
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机译:本发明试图提供一种具有优异的硬度和润滑性的硬质涂层。通过提供一种包括<?in-line-formulae description =“ In-line Formulae” end =“ lead”?>(Al 1-a Sub> V a Sub>)(C 1 -X Sub> N X Sub>),其中<?in-line-formulae description =“ In-line Formulae” end =“ tail”?> <?in-line-formulae description =“ In -line公式“ end =” lead“?> 0.27≦ a I>≦0.75,<?in-line-formulae description =”在线公式“ end =” tail“?> <?in -line-formulae description =“ In-line Formulae” end =“ lead”?> 0.3≦ X I>≦1,<?in-line-formulae description =“ In-line Formulae” end =“尾巴”?>其中a和X独立地表示原子比。
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