Microsystem, in particular a microgyrometer, with a detection element having capacitive electrodes

摘要

the microgyromu00e8tre is carried out in a substrate and includes means for detection of displacement of two oscillating masses (2a), in a direction of extent (oy), perpendicular to an excitation direction (ox).the detection means comprise a framework of excitation (6a), associated with the oscillating mass (2a), and a movable sensor element (8a), surrounded by a frame (6a) for excitation with a plurality of movable electrodes (10a), and the first and second sets of electrical rodes fixed (11, 12) interconnected and integral with the substrate on which they are formed.the movable electrode (10a) is disposed between the fixed electrodes (11, 12) associated with the first and second games, to form two variable capacitors differentially.the fixed electrodes (11, 12) of each set are interconnected by means of connecting rods (13, 14) of electrically conducting material which extends above the fixed electrodes (11, 12), in a plane substantially parallel to the substrate.