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NITROGEN CONTAINED-DLC(DIAMOND LIKE CARBON) FILM MANUFACTURING METHOD AND PRODUCTS
NITROGEN CONTAINED-DLC(DIAMOND LIKE CARBON) FILM MANUFACTURING METHOD AND PRODUCTS
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机译:氮污染的DLC(类金刚石)薄膜的制造方法及产品
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摘要
A DLC (Diamond like carbon) method of coating and the product in which the nitrogen having corrosion resistance is contained are provided. A DLC method of coating in which the nitrogen occurs plentifully performs a sputtering process(P10) pre-processing the substrate surface; an underlying layer formation process(P20) forming the underlying layer which becomes nano in the substrate surface; and a DLC layer coating process(P30) coating the DLC(Diamond Like Carbon) layer in which the pulverized body is not generated in the lower limb surface and the hardness is improved.
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