MULTI-FUNCTIONAL VACUUM SYSTEM FOR FIELD EMISSION AND ELECTRICAL PROPERTY MEASUREMENT

摘要

A multi-functional vacuum system for field emission and electrical property measurement is provided to accurately automatically obtain data about the physical properties in high vacuum state. In a multi-functional vacuum system, a grid electrode(110) is formed within a vacuum chamber(100). A voltage from a high voltage power source is supplied to the grid electrode through a feedthrough passing the single-side of the vacuum chamber. A vacuum chamber is discharged with the turbo pump(101), and the measurement sample(111) is mounted on the sample probe(115). The sample probe is inserted within the vacuum chamber and it functions as the cathode for measuring the physical properties of the measurement sample. While the sample probe mounts the measurement sample, it is detachable from the vacuum chamber.