MANUFACTURE METHOD FOR ORDERED FEPT MULTILAYER THIN FILMS BY RAPID THERMAL ANNEALING

摘要

A manufacturing method of a regular FePt multi-layered thin film using a rapid thermal process capable of accelerating the phase transformation of the FePt multi-layered thin film is provided to increase coercive force under the rapid thermal process after manufacturing FePt multilayer. A manufacturing method of a regular FePt multi-layered thin film using a rapid thermal process is as follows. The FePt multilayer is manufactured by using the DC sputtering(ST1). The rapid thermal processing is performed about the manufactured FePt multilayer(ST2). The FePt multi-layered thin film is manufactured by the DC magnetron sputtering apparatus. The DC sputtering performs the initial vacuum drawing 1x10-8~5x10-8 torr. The evaporation is performed after the injection of the Ar gas while maintaining the degree of vacuum with 3~10 mtorr. The thin-film substrate used during the DC sputtering performance comprises the silicon substrate.