THIN FILM TYPE ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME AND THIN FILM TYPE ELECTRON SOURCE APPLICATION DEVICE

摘要

The present invention is to provide a thin-film electron source with the high heat resistance . ; The present invention is therefor provided with the upper electrode formed in contact with the substrate, and a lower electrode formed on one main surface side of the substrate , and the insulating layer formed in contact with the lower electrode , the insulating layer in the thin-film electron source , and the upper electrode of the first underlayer , a second underlayer , an intermediate layer , a laminated structure of the surface layer , wherein the first underlayer is IrO ₂ or RuO _{2 a} as the main constituent material and the second layer and the underlying Ir or Ru as the main constituent material , the intermediate layer is PtIr, PtRu, the type being selected from the group of the main constituent material and PtRh , the the surface layer is Au, and the type being selected from the group of Ag as the main constituent material .