THIN FILM TYPE ELECTRON SOURCE AND THIN FILM TYPE ELECTRON SOURCE APPLICATION EQUIPEMENT

摘要

PROBLEM TO BE SOLVED: To enable degradation of an insulation layer hardly generated in a thin film type electron source laminating a lower part electrode, the insulation layer and un upper electrode in that order.;SOLUTION: The upper electrode is made in a three-layer structure with an interface layer, an intermediate layer, and a surface layer from an insulation layer side. Sublimation enthalpy of an intermediate layer material is to be greater than that of the surface layer, and smaller than that of the interface layer. Or, the surface layer is omitted and a two-layer structure is made. By doing so, an image display device or a high-speed electron beam drawing device with a long life and high intensity can be achieved.;COPYRIGHT: (C)2005,JPO&NCIPI