ACCELEROMETER USING SUPERFICIAL ULTRASONIC WAVES

摘要

FIELD: physics; measuring.;SUBSTANCE: invention concerns to field of measuring technics and can be used in instrument making and mechanical engineering for acceleration measuring. The accelerometre contains inertial mass and a piezoelectric-crystal plate attached to the basis. The fastening field of the piezoelectric-crystal plate to the basis is located on an opposite side from reflecting structures on the piezoelectric-crystal plate between the reflecting structures forming in unison with the interdigitated transducer the uniform measuring resonator on the superficial ultrasonic waves. The piezoelectric-crystal plate can have a variable thickness in the field of an arrangement of reflecting structures.;EFFECT: increase of measurement accuracy of acceleration.;2 cl, 1 dwg