首页> 外国专利> A method for applying an anti-reflective layer on a plurality of radiation-emitting semiconductor chip

A method for applying an anti-reflective layer on a plurality of radiation-emitting semiconductor chip

机译:在多个发射辐射的半导体芯片上施加抗反射层的方法

摘要

A method for producing a plurality of radiation-emitting semiconductor chip (1), each with an epitaxially produced multilayer structure (8), the electromagnetic radiation generating active zone (12), and in each case one of the multilayer structure (8) supporting carrier element (3), the at least one side surface (7) by means of which electromagnetic radiation is coupled out, characterized in that a along separating (10) to individual support elements (3) with multilayer structure (8) a severed warfer (2), on an expandable support (5) is fixed, is provided, the distances of the semiconductor chip (1) to one another by means of stretching of the expandable support can be increased, the semiconductor chip (1) are fixed on an intermediate carrier, the expandable support is removed and subsequently in each case at least an antireflection layer (9) on at least a portion of the side surface (7) is applied.
机译:一种用于制造多个发射辐射的半导体芯片(1)的方法,每个发射芯片具有外延制造的多层结构(8),电磁辐射产生有源区(12),并且在每种情况下,多层结构(8)中的一个支承载体元件(3),通过其至少一个侧面(7)被耦合出电磁辐射,其特征在于,沿分隔物(10)与具有多层结构(8)的单个支撑元件(3)分离开的翘曲器(2)在固定有可膨胀支撑件(5)的状态下,通过可膨胀支撑件的拉伸,能够增大半导体芯片(1)彼此的距离,将半导体芯片(1)固定在其上。在中间载体上,除去可膨胀的支撑物,然后分别在侧面(7)的至少一部分上施加至少一个抗反射层(9)。

著录项

  • 公开/公告号DE10339982B4

    专利类型

  • 公开/公告日2009-10-08

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE2003139982

  • 发明设计人

    申请日2003-08-29

  • 分类号H01L33/00;H01S5/02;

  • 国家 DE

  • 入库时间 2022-08-21 19:10:01

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