Micromechanical capacitive pressure sensor e.g. differential pressure sensor, for measuring pressure of gas, has electrode laterally moving over another electrode for detecting pressure signals, and counter element opposite to diaphragm

摘要

The sensor has an electrode (150) integrated in a moving diaphragm (110) and an electrode (160) integrated in a counter element that is arranged opposite to the moving diaphragm. The electrode (150) laterally moves over the electrode (160) for detecting the pressure signals. A hollow space (130) is provided between the diaphragm and the counter element such that the electrode (150) is provided as a protuberance (120) of the diaphragm in the hollow space, where the protuberance includes a plunger. The electrode (150) has a conductive layer, which is arranged around the hollow space. An independent claim is also included for a micro mechanical method for manufacturing a capacitive pressure sensor.