Changing thermal, electrical and optical characteristics of a transparent conductive oxide layer useful in flat screens or thin-film solar cells, comprises irradiating transparent conductive oxide layer with a laser light of a laser device

摘要

The method for changing thermal, electrical and optical characteristics of a transparent conductive oxide (TCO) layer (11) useful in flat screens or thin-film solar cells, comprises irradiating the TCO-layer with a laser light of a laser device, which comprises a semiconductor laser. The laser light has a wavelength of 808 nm and a linear-intensity distribution (4) on the TCO-layer, and is moved in a direction vertical to the longitudinal extent of the linear-intensity distribution with a speed of 0.15 m/s over the TCO-layer. The laser device is operated in continuous-wave mode. The method for changing thermal, electrical and optical characteristics of a transparent conductive oxide (TCO) layer (11) useful in flat screens or thin-film solar cells, comprises irradiating the TCO-layer with a laser light of a laser device, which comprises a semiconductor laser. The laser light has a wavelength of 808 nm and a linear-intensity distribution (4) on the TCO-layer, and is moved in a direction vertical to the longitudinal extent of the linear-intensity distribution with a speed of 0.15 m/s over the TCO-layer. The laser device is operated in continuous-wave mode. The linear-intensity distribution has a width of 20 mu m, a length of 3.3 m and a power density of 200-300 kW/cm 2. The ratio of the length of the linear-intensity distribution to its width is 165.000. The length of the linear-intensity distribution corresponds to the width of the TCO-layer in the direction to the longitudinal extent of the linear-intensity distribution. The length and the power density of the linear-intensity distribution are changeable.