EVACUATION UNIT AND POWER SAVING METHOD FOR SAVING ELECTRIC POWER CONSUMPTION OF EVACUATION UNIT

摘要

PROBLEM TO BE SOLVED: To provide an evacuation unit capable of saving electric power consumption in use and standby, and capable of quickly using a vacuum chamber when necessary.;SOLUTION: The evacuation unit 10 is formed of a turbo-molecular pump 11 connected with a first exhaust pipe 16, a roughing vacuum pump 12 connected to the pump 11 via a second exhaust pipe 19, a first vacuum valve 13 capable of opening-closing the exhaust pipe 16, a second vacuum valve 14 capable of opening-closing the exhaust pipe 19, and a controller 15. In the unit 10, in its use and standby in a state of being connected to the vacuum chamber 17, while continuously operating the pump 11, a pump 12 is intermittently operated by repeating starting and stopping, and the valve 14 is put in a closed state in response to the stopping of the pump 12, and the valve 14 is put in an opening state in response to the starting of the pump 12.;COPYRIGHT: (C)2010,JPO&INPIT