SUBSTRATE TYPE SENSOR AND ROLLING BEARING DEVICE HAVING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a substrate type sensor capable of increasing the number of turns of a coil for detecting displacement formed on a substrate and increasing current flowing in a coil for actuators for generating electromagnetic fields.;SOLUTION: The substrate type sensor 7 includes: a substrate body 16 that comprises a plurality of conductive layers L1-L8 and has an insertion opening 22 for inserting a target member 4; a coil (m) for actuators that is formed on one or a plurality of conductive layers L1 of the substrate body 16 so that the coil rotates around the insertion opening 22 and to which a drive current is supplied; and a coil (n) for sensors of displacement in a radial direction that is formed around the insertion opening 22 to the conductive layers L4-L8 different from the coil (m) for actuators and outputs a change in a gap in the radial direction between itself and the target member 4 according to a change in inductance.;COPYRIGHT: (C)2010,JPO&INPIT