MAGNETIC SHIELD FOR SUBSTRATE TYPE SENSOR, SUBSTRATE TYPE SENSOR DEVICE, AND ROLLING BEARING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent circuit elements from being easily affected by magnetism generated by coils by efficiently disposing the coils and circuit elements of a substrate type sensor in a limited space of a substrate area.;SOLUTION: A substrate type sensor device includes: a substrate type displacement sensor 7 having coils m, n for generating magnetism and circuit elements 27, 28; and a magnetic shield 24 including a side face that abuts on the displacement type sensor 7, formed annularly to surround the periphery of the coils m, n, and preventing magnetic flux from leaking from the coils m, n. A recess 24C for avoiding contact with the circuit elements 27, 28 is formed on the side face of the magnetic shield 24, and the circuit elements 27, 28 are disposed in the recess 24C partially or entirely.;COPYRIGHT: (C)2010,JPO&INPIT