FIXTURE FOR MEASURING SHAPE OF OBJECT TO BE MEASURED AND METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE

摘要

PROBLEM TO BE SOLVED: To speedily and three-dimensionally measure the front and back surfaces of an object to be measured with high accuracy.;SOLUTION: A fixture 10 for measuring the shape of an object to be measured for measuring the three-dimensional shapes of both front and back surfaces of: a lens 20; a reference spheres 20A; and a reference cylinder 30 from either the front surface side or the back surface side is used to obtain coordinates of the center point of the reference sphere 20A; coordinates of the center points of circles constituted of cross sections of the reference cylinder 30 at two points separated from each other by a prescribed distance H; coordinates Pr1 and Pr2 of the vertices of an R1 surface and an R2 surface of the lens 20; and the directions of their optical axes L1 and L2. Measurement data on the R2 surface side are rotated on a Y-axis by 180°, and measurement data on the R1 surface side and the R2 surface side are moved in parallel in such a way that coordinates Os of the center point of the reference sphere 20A may be matched to determine the eccentricity d and tilt θ of the R2 surface to the R1 surface.;COPYRIGHT: (C)2010,JPO&INPIT