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Three-dimensional shape measurement of specular object with discontinuous surfaces by direct phase measuring deflectometry

机译:直阶段测量偏转测定与不连续表面的镜面对象的三维形状测量

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Phase measuring deflectometry (PMD) has been widely studied to obtain three-dimensional (3D) shape of specular surfaces.Due to the procedure of slope integration, complicated specular components having discontinuous surfaces cannotbe measured by the existing PMD methods. This paper presents a novel Direct PMD (DPMD) method to solve this problemof measuring discontinuous specular objects. A mathematical model is established to directly relate the absolutephase and depth data. Then a hardware measuring system has been set up. The system parameters are calibrated by usinga plane mirror and a translating stage. 3D shape of an artificial specular step, a monolithic multi-mirror array havingmultiple specular surfaces and a reflected diamond distribution surface has been measured. The experimental results verifiedthat the proposed method based on DPMD successfully measured full-field 3D shape of specular objects havingdiscontinuous surfaces accurately and effectively.
机译:已经广泛研究了相位测量偏转测量(PMD)以获得镜面的三维(3D)形状。由于斜率集成的程序,具有不连续表面的复杂镜面组分不能通过现有的PMD方法测量。本文提出了一种新的PMD(DPMD)方法来解决这个问题测量不连续的镜面物体。建立数学模型直接相关绝对值相位和深度数据。然后已经建立了硬件测量系统。使用系统参数进行校准平面镜和翻译阶段。 3D人造镜面步骤的形状,单片多镜子阵列已经测量了多个镜面和反射金刚石分布表面。实验结果已核实基于DPMD的提议方法成功测量了镜面对象的全场3D形状准确且有效地表面。

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