METHOD FOR MANUFACTURING SUPERCONDUCTIVE THIN-FILM WIRE MATERIAL, SUPERCONDUCTIVE THIN-FILM WIRE MATERIAL, AND SUPERCONDUCTIVE THIN-FILM WIRE MATERIAL MANUFACTURING APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide a method for manufacturing a superconductive thin-film wire material that can continuously form a uniform superconductive thin film with a thick film even in prolonged thin film formation. PSOLUTION: The method for manufacturing the superconductive thin-film wire material includes processes for: preparing a base material having an intermediate layer on a metal substrate; preparing a target material in a position to face the base material; and irradiating the target material with energy beams to form plasma including atoms released from the target material, and supplying the atoms included in the plasma, onto the surface of the intermediate layer to form the superconductive thin film. In the process for forming the superconductive thin film, the metal substrate is heated by an induction heating method. PCOPYRIGHT: (C)2010,JPO&INPIT