METHOD OF MANUFACTURING RE123 SUPERCONDUCTING THIN FILM WIRE ROD, AND RE123 SUPERCONDUCTING THIN FILM WIRE ROD

摘要

PPROBLEM TO BE SOLVED: To provide a method of manufacturing an RE123 superconducting thin film wire rod by which even if the RE123 superconducting thin film wire rod has a large thickness, no cracks are formed on an RE123 superconducting thin film after introduction of oxygen thereto to provide the RE123 superconducting thin film wire rod having a high critical current value. PSOLUTION: The manufacturing method includes a precursor forming step of applying a raw material to a substrate to form a precursor wire rod, a thin film forming step of subjecting the precursor wire rod to heat treatment in an oxygen-containing atmosphere to form an RE123 superconducting thin film, a first heat treatment step of subjecting the superconducting thin film to heat treatment, after the thin film forming step in an atmosphere with oxygen concentration lower than oxygen concentration at the thin film forming step, and a second heat treatment step of subjecting the superconducting thin film to heat treatment after the first heat treatment step in an atmosphere with oxygen concentration higher than oxygen concentration at the thin film forming step. PCOPYRIGHT: (C)2010,JPO&INPIT