PROBE FOR SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a probe capable of allowing a tip portion of a probing section to approach a specimen as close as possible in the case where a plurality of probes are used.;SOLUTION: This probe has the probing section 34 that is fixed to a vibrator 33 and has the tip portion 34A which is sharpened. Under the condition where the probe is placed to face a specimen S, the tip portion 34A of the probing section 34 is provided so as to be inclined with respect to a surface of the specimen S and to be outside of the surface of the specimen S in the surface direction rather than the vibrator 33. The tip portion 34A can be visually observed from the upper or lower direction roughly perpendicular to the surface of the specimen S.;COPYRIGHT: (C)2010,JPO&INPIT