PROBLEM TO BE SOLVED: To measure an electric charge distribution or an electric potential distribution on a surface of a dielectric body with high accuracy in micron order.;SOLUTION: This electrostatic latent image evaluation device radiates a charged particle beam to the photoreceptor sample 25 having a surface charge distribution or a surface potential distribution, and measures the electrostatic latent image of the sample by a detected signal obtained by irradiation of the charged particle beam. The electrostatic latent image evaluation device includes an optical scanner 30 for radiating laser light of a wavelength of 400 to 800 nm to the sample and forming an electrostatic latent image, an electrostatic latent image measuring means for measuring the size of the electrostatic latent image a plurality of times while changing the exposure energy density radiated to the photoreceptor sample 25, and a comparing means for evaluating the electrostatic latent image by comparing the variations in size of the plurality of electrostatic latent images caused by the difference in the exposure energy density radiated to the photoreceptor sample based on the plurality of measurement results by the measuring means.;COPYRIGHT: (C)2010,JPO&INPIT
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