Resonant beam accelerometer with a rotating pivot lever arm

摘要

Movable seismic mass that allows only translational movement along the sensitive axis (Oy) in its plane by being suspended to the substrate by the elastic connecting portion (12, 14) the invention (10) on microfabricated accelerometer to use. By being associated (20) is force amplifying structure elongated resonator one mass acting on the resonator, at least. The amplification structure comprises (30) a rigid lever arm, a first end of the lever arm (32) is vertical and has a high stiffness in the direction of the sensitive axis (Oy) in the plane of the mass is connected to the seismic mass by (36) connecting portion having a low stiffness in the direction, the second end (34) is connected anchor point on the substrate (A6). The second end of the lever arm (32), rigidity is connected to (A6) The anchor point rotational connecting portion around the center of rotation (M) and surrounds (A6) anchor point by (38, 40) is the head. Distance h (small compared to the length L of the lever arm, but non-zero) longitudinal axis of the resonator the resonator at point (B), such as through the away by the (M) rotation center of the rotary coupling part one end of is fixed to a rigid head. [Selection] Figure Figure 1