A substrate reversing device, the substrate transfer apparatus, the substrate processing apparatus, the substrate reversing method, the substrate transfer method and a substrate processing method

摘要

PROBLEM TO BE SOLVED: To provide a substrate inversion device and a substrate inversion method with which a substrate can securely be inverted with the small number of processes and a simple structure, and miniaturization is realized.;SOLUTION: The substrate W is supported on a plurality of substrate support pins 73b disposed on a second movable member 75. The first and second movable members 74 and 75 mutually move so that a plurality of the substrate support pins 73b are close to a plurality of substrate support pins 73a. The first and second movable members 74 and 75 are inverted in a state where the substrate W is held between the substrate support pins 73a and 73b. The first and second movable members 74 and 75 relatively move so that a plurality of substrate support pins 73a and 73b are mutually separated.;COPYRIGHT: (C)2006,JPO&NCIPI