/ / / An apparatus for transferring/reversing a substrate a system for transferring/reversing a substrate using the apparatus and a method for transferring/reversing a substrate

摘要

PURPOSE: A wafer transfer/rotation apparatus is provided to easily install a small space and to reduce manufacturing costs by improving the structure of the apparatus. CONSTITUTION: A transfer/rotation apparatus moves along a linear traveling rail. A plurality of load/unload units are arrayed beside the linear traveling rail side by side. A multiple of processing units are arrayed on the opposite side of the load/unload units using the linear traveling rail as a datum line. A main unit fixed to the load/unload units controls the resultant structure. The transfer/rotation apparatus has a finger assembly(9). The finger assembly(9) further includes supporting part(10) connected to a pair of arms(6a,6b), clamping parts(11) located in the edge portion of the finger assembly(9) clamping wafer(W) and wafer rotation parts(12) located between the supporting parts(10) and the clamping parts(11) rotating the wafer(W) by circulating the clamping parts(11). At this point, the transfer and the rotation of the wafer(W) are simultaneously performed without a rotation unit and a sub-arm.