DEVICE AND METHOD FOR PROCESSING A SUBSTRATE CAPABLE OF TRANSFERRING A FOLLOWING SUBSTRATE BEFORE A PRECEDING SUBSTRATE IS COMPLETELY REVERSED

摘要

PURPOSE: A device and method for processing a substrate are provided to maximally reduce the waiting time of a transfer robot.;CONSTITUTION: A reverse giving and taking unit(RVPASS2) includes a third retention support unit(93) and a fourth retention support unit(94). The third retention support unit and the fourth retention support unit are vertically symmetrical by interposing a rotation center axis. A transfer robot transfers the substrate to the third retention support unit or the fourth retention support unit at a height position(H4). The substrate reversed by the reverse giving and taking unit is received at a height position(H3) by the transfer robot. The transfer robot transfers the following substrate before the preceding substrate is not completely reversed.;COPYRIGHT KIPO 2011