Generating the ionization mannered null gas cluster of the gas cluster ion beam

摘要

PROBLEM TO BE SOLVED: To provide a gas cluster ion beam emitting apparatus which is capable of operating normally for a long period of time.;SOLUTION: The emitting apparatus 50 has a gas cluster generation chamber 2 and a nozzle 3, which serve as a means for generating gas clusters and emitting the gas clusters onto a work 10. A group of gas clusters jetted from the nozzle 3 are transformed into a beam of gas cluster flow 8 as the clusters pass through a skimmer 4. The gas cluster flow 8 is irradiated with electrons from an electron gun 12, which ionizes the gas clusters in the gas cluster flow 8.;COPYRIGHT: (C)2006,JPO&NCIPI