Electrical characteristics testing device of semiconductor devices

摘要

PROBLEM TO BE SOLVED: To provide a common device performing an electric characteristic test not generating deformation of a reed at a testing time, and performing simultaneously both the test and visual inspection, with background information wherein, since an electric characteristic testing device of a semiconductor device has a constitution wherein a contact pin for characteristic measurement is brought into contact with a reed shoulder part of the semiconductor device, a load is applied to the reed to thereby deform the reed, and since the visual inspection of the reed part is performed on a different inspection device from the electric characteristic testing device, two systems of exclusive device are required, to thereby generate a wasteful process from the viewpoint of cost.;SOLUTION: The electric characteristic test is performed with a constitution wherein the tip part of the contact pin of the semiconductor device loaded on a carrier is brought into contact with the opposite side to a mounting face of a reed root, and the first contactor of a test head is brought into contact with the mounting face side of the reed root, and the second contactor of the test head is brought into contact with a contact terminal of a wiring part, and an illumination/imaging device for the visual inspection is provided on the constitution.;COPYRIGHT: (C)2007,JPO&INPIT