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ELECTRIC CHARACTERISTIC TESTING DEVICE OF SEMICONDUCTOR DEVICE, AND COMMON DEVICE FOR ELECTRIC CHARACTERISTIC TEST AND VISUAL INSPECTION OF SEMICONDUCTOR DEVICE
ELECTRIC CHARACTERISTIC TESTING DEVICE OF SEMICONDUCTOR DEVICE, AND COMMON DEVICE FOR ELECTRIC CHARACTERISTIC TEST AND VISUAL INSPECTION OF SEMICONDUCTOR DEVICE
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机译:半导体装置的电特性测试装置,以及半导体装置的电特性测试和视觉检查的通用装置
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摘要
PROBLEM TO BE SOLVED: To provide a common device performing an electric characteristic test not generating deformation of a reed at a testing time, and performing simultaneously both the test and visual inspection, with background information wherein, since an electric characteristic testing device of a semiconductor device has a constitution wherein a contact pin for characteristic measurement is brought into contact with a reed shoulder part of the semiconductor device, a load is applied to the reed to thereby deform the reed, and since the visual inspection of the reed part is performed on a different inspection device from the electric characteristic testing device, two systems of exclusive device are required, to thereby generate a wasteful process from the viewpoint of cost.;SOLUTION: The electric characteristic test is performed with a constitution wherein the tip part of the contact pin of the semiconductor device loaded on a carrier is brought into contact with the opposite side to a mounting face of a reed root, and the first contactor of a test head is brought into contact with the mounting face side of the reed root, and the second contactor of the test head is brought into contact with a contact terminal of a wiring part, and an illumination/imaging device for the visual inspection is provided on the constitution.;COPYRIGHT: (C)2007,JPO&INPIT
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