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The field-effect transistor the ferroelectric memory unit and its production method

机译:场效应晶体管铁电存储单元及其制造方法

摘要

Topic Structure being simple, the field-effect transistor which is superior in data-hold quality the ferroelectric memory unit and these production methods are offered.SolutionsThe source territory 2 and the drain territory 3 is formed in baseplate 1, this source territory the ferroelectric membrane or ferroelectric layer 5 is formed on channel territory 4 with 2 and the drain territory 3. This time, ferroelectric layer 5 the inorganics strongly is formed with the induced electricity substance and the blend of the organic matter. Ferroelectric layer 5 the inorganics strongly forms the induced electricity substance and the mixed solution of the organic matter, applies this mixed solution on the baseplate and forms after forming ferroelectric layer, via the process which it calcines and etches this and. Selective figure Figure 2
机译:<主题>结构简单,提供了保持数据性能优良的铁电存储单元的场效应晶体管及其制造方法。解决方案在基板1中形成源极区2和漏极区3,该源极区在具有2和漏极区3的沟道区4上形成铁电膜或铁电层5。这一次,铁电层5中的无机物强烈地与感应电物质和有机物的混合物形成。铁电层5中,无机物强烈地形成感应电物质和有机物的混合溶液,将该混合溶液施加到底板上,并在形成铁电层后通过煅烧和蚀刻的过程形成。 2

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